Axcelis Technologies, Inc. (ACLS) Earnings Call Transcript & Summary

May 4, 2023

NASDAQ US Information Technology Semiconductors and Semiconductor Equipment earnings 49 min

Earnings Call Speaker Segments

Operator

operator
#1

Good day, ladies and gentlemen, and welcome to the Axcelis Technologies call to discuss the company's results for the first quarter. My name is Liwei, and I will be your coordinator for today. [Operator Instructions] As a reminder, this conference is being recorded for replay purposes. I would now like to turn the presentation over to your host for today's call, Mary Puma, President and CEO of Axcelis Technologies. Please proceed, ma'am.

Mary Puma

executive
#2

Thank you, Liwei. With me today is Kevin Brewer, Executive Vice President and CFO; Russell Low, Executive Vice President of Global Customer and Engineering Operations; and Doug Lawson, Executive Vice President of Corporate Marketing and Strategy. If you have not seen a copy of our press release issued yesterday, it is available on our website. Playback service will also be available on our website as described in our press release. Please note that comments made today about our expectations for future revenues, profits and other results are forward-looking statements under the SEC's safe harbor provision. These forward-looking statements are based on management's current expectations and are subject to the risks inherent in our business. These risks are described in detail in our Form 10-K annual report and other SEC filings which we urge you to review. Our actual results may differ materially from our current expectations. We do not assume any obligation to update these forward-looking statements. Good morning, and thank you for joining us for our first quarter 2023 earnings call. In March, we celebrated the 45th anniversary of the founding of Axcelis. As we pass this milestone and as I pass the leadership baton to Russell, I'm happy to report that Axcelis is in a great place. We have a solid balance sheet, the strongest product portfolio in our 45-year history and an excellent team of employees, suppliers and customers. We are well positioned for future growth and profitability. Exiting the first quarter of 2023, demand for the Purion product family remains extremely strong, especially in the high-growth silicon carbide power segment. Revenue for the first quarter was $254 million, with earnings per share of $1.43. Backlog set a record at $1.27 billion, with quarterly bookings of $298 million, driven by Purion demand and strength in the power market. For the second quarter of 2023, we expect revenue between $255 million and $260 million, gross margin of roughly 42%, operating profit of around $55 million and earnings per share of $1.44 to $1.48. At the beginning of this year, we expected 2023 revenue to exceed $1 billion. We are now forecasting to beat that estimate by $30 million, exceeding $1.03 billion. This represents revenue growth of approximately 12% in a year in which overall wafer fab equipment is expected to decrease by over 20%. In the second half, in addition to stronger revenues, we expect significant margin expansion driven by mix and improved costs. The mature process technology market continues to be an area of strength for Axcelis with 89% of first quarter system shipments going to mature foundry logic customers and 11% to memory customers composed entirely of DRAM. The geographic mix of our system shipments continues to be distributed globally and representative of spending patterns in each geography. In the first quarter, China accounted for 45%; the U.S., 17%; Korea, 14%; Taiwan, 4%; Europe, 2%; and the rest of the world, 18%. The power device market continues to drive our growth during this industry downturn. We are actively engaged with all customers in this high-growth market segment, winning business from new customers and expanding our footprint at existing customers. We expect over 55% of our system revenue in 2023 to come from this segment with greater than 50% of total power device system revenue coming from silicon carbide applications. In addition to significant pull for our Purion M silicon carbide tool, we also see increasing adoption of Purion H200 silicon carbide and Purion XE silicon carbide systems. As a result, we expect revenue from silicon carbide customers to be spread relatively evenly across the Purion power series product family. Purion power series products for silicon carbide have been designed to support the technical challenges facing our customers as they ramp to high volume in support of their automotive customers. Axcelis is the only ion implant company that can deliver complete recipe coverage for all power device applications. The full Purion power series family of products allows customers to optimize their fabs for high-volume manufacturing and to continuously improve their power device performance. Axcelis is considered by power device customers to be the technology leader and supplier of choice providing the best product family and manufacturing capabilities. This means that using Axcelis tools provides the lowest risk path to high-volume manufacturing required to support aggressive fab ramp plans. Axcelis places significant value on enabling our customers to succeed in this exciting market by providing differentiated product performance and a high level of customer satisfaction. Although our memory and advanced logic customers are experiencing a downturn, Axcelis continues to stay close to them to support their installed bases and understand their technology and manufacturing needs. It is during downturns that there is an increased ability to collaborate with our customers to expand opportunities for Axcelis during the next upturn. We have multiple evaluation systems in the field and many customer engagements designed to increase our footprint in these market segments. As the industry exits this downturn, Axcelis will experience significant growth as these traditional semiconductor segments recover. This, combined with continued strength in the power and mature markets, will drive Axcelis to our $1.3 billion model and beyond. Now I'd like to turn it over to Kevin.

Kevin Brewer

executive
#3

Thank you, Mary, and good morning. We are pleased with our first quarter 2023 financial results and are excited about our full year revenue, which is now expected to exceed $1.03 billion, representing year-over-year growth of approximately 12%. Looking at our first quarter, revenue finished well above guidance due to solid execution and continuing strong demand for Purion. Q1 revenue was $254 million with systems revenue of $195.2 million and CS&I hit $58.8 million. Strong bookings and quoting activity for systems in the Power segment continued in the quarter, which supports our expectation that greater than 55% of revenue will come from this market in 2023. CS&I revenue will fluctuate quarter-to-quarter but it should be modeled at approximately $245 million for 2023 to $300 million and our $1.3 billion revenue model. Q1 gross margin finished at 40.9%, slightly lower than guidance due to CS&I being a lower percent of total revenue. We expect margins to improve to approximately 42% in Q2 but still remain under pressure caused by higher material costs and mix. We are forecasting a significant gross margin improvement in the second half of the year as costs improve and we move to a more favorable product mix. This should allow us to achieve our full year gross margin target of approximately 44%. We remain laser focused on margin improvement and have numerous initiatives underway to lower the cost of goods and drive higher sales of Purion product extensions. This allows us to target gross margin take greater than 45% and the $1.3 billion model. Turning to operating expenses. The first quarter ended at 20.7% of revenue and better than our guidance. We expect OpEx to be relatively flat in the second quarter at approximately 21%. As always, we will continue to tightly control spending while investing in areas of the business that support business growth, solidify our technology advantage in the specialty market and increase our footprint in memory and advanced logic markets. Additionally, we will continue to invest in our employees and the infrastructure required to achieve our financial models. One example of infrastructure investment is our new state-of-the-art logistics center in Beverley, Mass, located just a short walk from our headquarters. The facility is scheduled to open this summer and provide centralized logistics and flex manufacturing capacity. We also plan to further ramp our Beverley in Korean operations as capacity needs grow. We are comfortable at this point that we have the initiatives underway that support our $1.3 billion model. We ended Q1 with $445 million of cash, cash equivalents in short-term investments and generated $34.6 million of cash from operations. In the quarter, we repurchased $12.5 million of stock and have returned over $145 million of cash to our shareholders while curtailing share count growth. Axcelis has a rare opportunity to grow revenue and profitability during a significant industry downturn. This is a result of a strong product positioning in the power device market and continued strong execution in a challenging environment. We also look forward to continued growth in memory and advanced logic as the overall semiconductor market recovers. Once again, I want to thank the entire Axcelis team for their continued outstanding performance. I also want to thank our supply chain partners for their hard work supporting Axcelis and our customers for their confidence in Axcelis to deliver. I will now turn the call back to Mary for closing comments.

Mary Puma

executive
#4

Thank you, Kevin. As I did last time, I will end this call by outlining the Axcelis business thesis which supports over $1.03 billion in revenues in 2023 and $1.3 billion over the next few years. It is based on the following 5 key points. First, the implant TAM has more than doubled in the last few years with mature market segments representing greater than 60% of the total TAM. Second, power devices and image sensors are highly implant intensive, and the general mature nodes have increasing implant intensity peaking at 28-nanometer. Third, high-value Purion product extensions were designed to optimize power and image sensor device manufacturing, uniquely positioning Axcelis to benefit from high growth in the mature process technology market. Fourth, Purion product differentiation has propelled Axcelis to implant leadership in these high-growth specialty device market segments. And fifth, we have strong long-term customer relationships and a fundamental cultural desire to win by making our customers successful. I have worked closely with Russell and the rest of the executive team to develop and execute the strategy I just outlined. Axcelis will continue to execute this strategy as Russell and I transition into our new roles. I have great confidence that Axcelis will continue to be a leading capital equipment supplier to the semiconductor industry. I want to thank our employees, suppliers, customers and investors for your past support, and I hope that you will continue that support into the future. With that, I'd like to open it up for questions.

Operator

operator
#5

[Operator Instructions] And our first question comes from the line of Tom Diffely.

Thomas Diffely

analyst
#6

Materials today, are they back to kind of pre-COVID or pre-inflationary levels? Are we at a consistently higher rate than we were, say, 2 years ago?

Kevin Brewer

executive
#7

I only got half of that question. I don't know if -- Doug or Mary, did you get the whole thing?

Mary Puma

executive
#8

No.

Doug Lawson

executive
#9

No. Tom, can you repeat?

Thomas Diffely

analyst
#10

Is that better?

Kevin Brewer

executive
#11

Yes, yes. So I missed the first part. So if you want to...

Thomas Diffely

analyst
#12

Okay. Yes, my first. So just on the gross margin front, when you're getting into new contracts and looking at the materials on a go-forward basis, are prices back to kind of pre-COVID or levels they were a couple of years ago? Or are we at a permanently higher level that's just a fact of business today?

Kevin Brewer

executive
#13

So that's a good question. So they're certainly getting better. I think getting back to pre-pandemic levels is going to be difficult in some areas. While there's others where we have more opportunity to change suppliers, for example, and some of the commodity level things, there's a little more opportunity to get the cost out. But we are -- I get the good news right now, Thomas, is we are starting to see favorable costs coming in our material, which should start hitting us in the back end of the year in Q3, Q4, which is why we feel comfortable taking the margins back up on a full year basis to about 44%. And as you know, that suggests we've got to get 300 to 400 basis points better in margins in the last 2 quarters. And based on mix and based on what we're seeing with current supply chain costs and using up some of the high-cost inventory that we've had, which has been the other problem, we feel comfortable getting back and hitting our full year gross margin. So I guess a quick summary is some things are probably never going to go back to where they were, but there's opportunity through supply chain rationalization to get costs back down and maybe even better for some pieces of this.

Thomas Diffely

analyst
#14

Okay. And then following up on that, when you look at your logistics center that you're opening this summer, will there be a material impact on the model as far as increased cost structure goes before that? And ultimately, do you expect that to decrease the cost going forward? Or just it's more just to increase the efficiency of making sure things get more the goal on time?

Kevin Brewer

executive
#15

Yes. So I mean we have the cost of that in the model. So when we talk about the full year gross margins and full year operating expense at approximately 20.5%, that's in near time. But the reality of it is we have a lot of random buildings all over the place where we're starting material right now, which is -- which has a lease cost with it. So when we initially opened, we're going to have some duplication. But over about a 6-month period to maybe as far as 9 months, these other locations, the leases run out. So the net impact of it is going to be favorable both from an efficiency point of view and from the ability to have everything in one location. So we're going to have a lot of robotics and very sophisticated material handling in this new facility. And again, we're going to exit several buildings that are scattered around the Beverley campus in surrounding communities right now once this thing is up and running.

Thomas Diffely

analyst
#16

Sounds like you'd be a good place for an analyst meeting.

Kevin Brewer

executive
#17

Well, we can give you a ride.

Thomas Diffely

analyst
#18

Last question for Mary. When you look at the nonmature markets, nonpower markets, memory and high-end logic, can you just talk a little bit about how you're positioned to take advantage of the recovery in the industry when it happens over the next couple of years?

Mary Puma

executive
#19

Sure. So as I mentioned in the script, we're working very closely with our memory customers right now to qualify both new Purion tools and additional recipe. Obviously, things are slow right now. But as things do improve, we expect to be able to leverage the work that we're doing right now to actually increase our business at our existing customers and make some additional headway even with some customers where we haven't been particularly strong in the past. In terms of advanced logic, we've talked about this at length. We continue to work with all the major advanced logic customers to find opportunities, particularly where Purion is differentiated where we can bring them -- bring that differentiation to improve their cost of ownership in their device performance. That is ongoing. And we also have talked about how we have recently placed a Purion Dragon into an advanced logic customer. That is -- it's an evaluation system that is going extremely well, and we expect that to result in more business. And we've also recently closed on an evaluation for Purion H for advanced logic, and we expect that to grow into additional business in the future as well. So nothing really has changed, Tom, in terms of what we're focused on. We're focused on just meeting our customers' requirements, not only in terms of their installed base, but also in terms of their emerging technology and manufacturing challenges.

Doug Lawson

executive
#20

And Tom, one other thing just to note is -- so the things Mary is talking about are the things that will drive us to that $1.3 billion model. So as memory recovers, as we continue to make deeper penetrations into advanced logic that, combined with continued growth in mature markets and power, are what drive us to the $1.3 billion model.

Operator

operator
#21

And your next question comes from the line of Craig Ellis of B. Riley Securities.

Craig Ellis

analyst
#22

Yes. Mary, I just want to start by congratulating you on the transition. You've had a remarkable career and really transitioning at a spectacular place in terms of where Axcelis is over that arc. So with that said, let me just start with the first question. So as I was talking with investors through the quarter, but especially through March and April, there was a lot of concern about some of the things they were seeing in the automotive market. And it seems like a lot of your prepared commentary really address the company's momentum. But can you just talk about whether you did see any order movement as you went through March and April or even very early May to date and any signals that may be coming out of automotive related to potentially slowing EV uptake or anything else?

Mary Puma

executive
#23

Yes. Thank you very much, Craig. It's been a pleasure working with you. We have not seen any significant changes at all, particularly in the mature process technology area related to power devices. I mean there are always minor shifts here and there depending on fab readiness, but we haven't seen anything move out. And in fact, if anything, our customers are basically, in some cases, asking for more. They're asking for more, and they're asking for it more quickly. So I think that, that's a very positive sign. Russell and I had dinner last night with a major player, a customer who produces power devices, and that was really the gist of the conversation that things are going extremely well. They're looking for additional capacity. There are all sorts of things going on with new fabs that are currently being announced and built. So we do not have any data points right now that indicate that there's an issue. And I know people, in particular, sometimes worry about China. But China is very strong right now, particularly in the power device area. That is definitely a growing area for investment for those customers. So right now, everything seems fine. We haven't seen any significant changes.

Craig Ellis

analyst
#24

That's really helpful color. The next question is really related to the new $1.03 billion plus view for calendar '23. So thanks for providing that. The question is this, if I incorporate the first quarter result and 2Q's guide, it could imply flattish sequential trends in the back half, and that seems to fit with some of the larger companies that we've heard from this reporting season to date. I'm just wondering without providing guidance, could you just provide some qualitative color on how you see the back half of the year?

Kevin Brewer

executive
#25

Well, I'll take that, Craig. So I guess I'll start by saying we did say we expect to exceed $1.03 billion. So...

Craig Ellis

analyst
#26

That sounds right so...

Kevin Brewer

executive
#27

Doesn't mean there couldn't be more there. But right now, that's a 12% year-over-year growth, as we said. Mary just talked about this continued strong demand. I'll also say our book-to-bill in the quarter came back up to 1.5. And I think last quarter it was 0.99. So it was 1 roughly. So things are still on a positive side for us, Craig. So it doesn't mean there can't be more there. But at this point, this is what we're comfortable with. But with the record backlog that we have right now and customers clamoring to want to pull things in, we'll do our best to try to exceed that $1.03 billion.

Craig Ellis

analyst
#28

Great. And then I'll just finish up with a question that's related to that, Kevin, but it goes back to some of the prepared comments on gross margin. So acknowledging that the back half means the 300 to 400 basis point rise from here, but with some of the issues working out prior higher cost inventory, it would seem to suggest that more of the step up would be in the fourth quarter than the third. Just given the underlying cost dynamics that are at play, is that a reasonable way to look at things?

Kevin Brewer

executive
#29

Yes. Yes, we're going to say incremental improvement. We obviously have to come up quite a bit in Q3. So -- but it will be incremental as it comes through in the back half. And again, based on everything I see right now with the mix and the cost profiles we have, we should get very close to that 44%, which considering kind of the whole, we dug ourselves starting out full year will be good. And I think that's the other point I'll make, too. I always tell and you know this as well. I always tell people look at Axcelis' gross margins on a full year basis because so much can move quarter-to-quarter. But I honestly look at -- always look at full year. And everything we do with programs to make things better, we're looking at a full year average. So yes, so I would -- you're going to have to step it up a little bit in Q3, though they'll get there, but it will be incremental. And then back to your prior question, any revenue growth would probably be the same way. It would be incremental as the quarters come on, if things grow beyond the number we put out there.

Craig Ellis

analyst
#30

Got it. Kevin, Mary, congratulations on the very strong execution.

Kevin Brewer

executive
#31

Thanks, Craig.

Mary Puma

executive
#32

Thanks, Craig.

Operator

operator
#33

Your next question comes from the line of Christian Schwab of Craig-Hallum.

Christian Schwab

analyst
#34

Congrats on another solid quarter. Mary, as we're looking at China, we've heard from Applied Materials and Lam and others talk about the significant investment that's going on in the mature nodes, a lot of that, obviously, power. And kind of the strategic shift to align production with domestic demand, which looks to be maybe a 3- to 4-year endeavor at least. So are you guys very optimistic about that type of market? Or are you just happy with the strength today and watching it closely?

Mary Puma

executive
#35

So we are very happy with what we're seeing right now in the mature process technology area. And we've talked many times about how we have leadership in implant in the mature process technology area. And we've talked about power devices, and we've talked about image sensors, and that all holds true. We believe that this strength will continue on into the future. Right now, there are still new fabs being announced. There's a lot of new construction, there's a capacity expansion, and we expect that to continue on. What I actually expected you to ask me about is if we had seen any change in some of the export control regulations, and we have not seen anything there. Things continue to flow for us from a licensing and export control standpoint. And we continue to monitor that extremely closely. And at this point, believe that, that situation will continue, that things will continue to be positive. So we're very bullish about China right now.

Doug Lawson

executive
#36

Christian, this is Doug. The other comment I'd like to make is that China represents one of the largest opportunities for electric vehicles. Government incentive programs and so forth have, of course, that country to -- last year, it was over 30% of new cars sold were EVs. So there's a lot of activity in the supply chain, which is where we play with the silicon carbide devices. So -- so we are very optimistic over the next few years for that to continue.

Christian Schwab

analyst
#37

Yes. And every day, I read about somebody else getting more funding from somebody in China to add to their capacity. So an extremely strong target market. On that is a great segue, not only in China, but listening to the large automobile manufacturers and who are getting more and more ambitious goals about the number of shipments that they expect to ship or cars delivered, if you will. Is the every 3 years doubling of silicon carbide wafers, what are the puts and takes of that? Were that 3 years from now, we can look at that or 2 years from now and say that, that was probably too conservative.

Doug Lawson

executive
#38

Well, we're still -- that's the data that we've got right now. We'll be relooking at that. There's certainly -- lots of people have met and tell it in one-on-ones that we're being conservative there. But the numbers vary all over. There's a lot of variables depending on the EV adoption rate, depending on the types of devices that are built, depending on the yields, depending on the ramp of 200-millimeter versus 150. So there's a lot of -- a lot of variables, Christian, that go into the equation. So we're very comfortable with the doubling every 3 years, and we'll revisit that over -- probably over the next 6 months.

Operator

operator
#39

And your next question comes from the line of Quinn Bolton of Needham.

Unknown Analyst

analyst
#40

And congrats on the continued success. So for my first question, as more power devices and auto shift to silicon carbide, what do you expect the impact to be on the traditional silicon power device market over the coming years? Will it still be a growth segment for some time? Or do you see an inflection point where that market will decline?

Doug Lawson

executive
#41

So Quinn, I'll take that one. The -- we expect [loan] market to continue to grow. The solid state power applications do continue to grow, and there's -- there's lots of places where the silicon is going better [indiscernible] and a lot of places in carbon [indiscernible] lots of places where limit. So there's 3 variable software technologies that really depend on the application. So what we expect to see silicon carbide will probably dominate the [indiscernible] over time, although there will be applications for silicon in auto. And then silicon carbide will start to make some growth in other areas, in energy, for example, as costs come down, as a result of volume driven by the automotive side. And then silicon has -- just silicon is always going to be a less expensive substrate. There's lots and lots of silicon. And so that's always going to be a consideration. So we expect growth in both. If you look at the trends that we've got in our presentation, you can see silicon carbide is currently overtaking in terms of the amount of implant tools, but silicon continues to be very, very strong.

Unknown Analyst

analyst
#42

Very helpful. And so for my second question, could you provide any color into the CMOS image sensor market? Is the ongoing weakness mostly driven by the consumer inventory corrections? And I guess through your conversations with customers, are you seeing any signs of a demand recovery in this segment?

Doug Lawson

executive
#43

Yes. Let me take the first part of that anyway. The slowdown in image sensors certainly is driven by the consumer market, so by -- primarily by phones. And so as that turns around, we would expect that, that business as a whole turns around. The thing that's going on right now is we've got the XEmax out there in evaluation, we've got one system that's already in production, the customers are prepping for the turnaround and there are more advanced devices for the next phase. The other piece that's big for image sensors is all the ADAS stuff, and that continues to be strong. When you look at the folks that have announced in the last week or so, auto continues to be strong, and image sensors are a piece of that. So we would expect that image sensors turn around pretty strong as the consumer market turns around, Quinn.

Unknown Analyst

analyst
#44

And one more quick one, if I may. So how much of the margin improvement in the second half is a function of a mix shift to high energy versus the alleviation of some cost headwinds? Any additional color there would be helpful.

Kevin Brewer

executive
#45

Yes. I mean, I'm not really going to break that out. But what I would tell you is that supply chain has been a constant problem for us for the last year, 1.5 years. So assuming that, that's a good chunk of it, it's probably not bad. But as you know from our investor presentation, high energy does carry better margins than high current. So I think in Q1, when we did the guidance, we talked about a bigger mix of high current, for example. So that is part of it. The other thing that's in there as well is on the freight side of things. We are seeing improvements with freight. As the supply chain has continued to recover, it's allowed us to not be doing overnight shipments or air shipments and getting back into containers and getting stuff brought in at much lower cost methods. And then even container shipments from coming from Asia, for example, they're probably -- I don't think the fact the way they were prepandemic, but they were up 4 or 5x, they're probably at 2x right now. So there's a lot of pieces coming -- starting to come through. And the last thing really was we did mentioned in the last call, too, that we had quite a bit of higher-priced inventory. So that's burning through and starting to be replaced with [through Amazon]. I'm not allowed to give you a percentage. That was...

Unknown Analyst

analyst
#46

No worries, no worries. I appreciate the color.

Kevin Brewer

executive
#47

Yes, no problem. Thanks.

Operator

operator
#48

And your next question comes from the line of David Duley.

David Duley

analyst
#49

Mary, I just wanted to echo Craig's comments. Congrats on a great run, and we're all very happy shareholders. First question from me is, Kevin, I guess the math works out. You're kind of guiding the first half gross margins at 41.5%. To get to 44%, you're going to have to average 46.5% in the back half of the year. That's just the way the math works out. Now my question there is, would that be the starting point for gross margins in calendar 2024? Is there any reason to think that we would have a dip back down in gross margins?

Kevin Brewer

executive
#50

Well, I mean, we have our $1.3 billion model out there. And if you look at kind of the pieces of gross margin, we always say CS&I is very accretive, right? So as we grow to $1.3 billion, CS&I will not grow as fast. Systems will grow faster, which in reality, if those margins aren't as good as CS&I, that puts a little pressure. So I don't think I'm prepared to say anything, Dave, beyond we have a $1.3 billion model that suggests at least 45% gross margins. As you know, we've made a lot of improvement on gross margins over the years. It continues to be, as I always say, an area we're laser focused on. I think you know I've got defense into the business, too, when it comes to margins. So I'm constantly looking for ways with the team to find how we can make things better. So if we can do better, we'll do better. But for now, we're trying to get back to that 44%. It's hard for me to say, even in Q1, right, I don't know what the mix is going to do necessarily, right? So that's why we say, look at the full year, don't hold me quarter-to-quarter, but we'll -- on a full year basis, we're going to get you to where we say we're going to guess.

David Duley

analyst
#51

Okay. And then kind of as a follow-on to an earlier question. Either on the 12% revenue growth that you have this year or the 39% revenue growth you had last year, how much of that comes from units increasing? And how much of that comes from ASP increases?

Kevin Brewer

executive
#52

Well, it's mostly all units. We haven't. I mean, as you know, we have -- I guess if you're asking, I mean, the product extensions have higher ASPs, which helps our margins. But we're -- it's not like we're all getting a lot -- we're not getting price increases on products we've been selling, for example, right? So it's really -- it's units. We're shipping more systems, we're shipping more CS&I. And yes, that's the simple answer.

Doug Lawson

executive
#53

I mean we announced that we had shipped the 500th Purion system earlier in the year. And so system shipments have certainly increased dramatically, yes.

David Duley

analyst
#54

Okay. And then as far as the backlog goes -- actually, not the backlog. There was a big increase in deferred revenue, both sequentially? And I think year-over-year, it's up like 2.5x. But what's the reason behind that?

Kevin Brewer

executive
#55

The simple answer is we are getting a lot of prepayments. And we've got $445 million of cash at the end of the quarter with short-term investments included. We have what I will call a meaningful amount of prepayment. So probably the biggest thing moving that, Dave, is the fact that, that prepayment balance continues to increase on systems. And the other piece of it is, as you know, we're tipping more tools and there is a piece of the revenue that could hung up until the install is complete, so that's growing. But I would say the most significant reason why we popped over the last few quarters is coming through on prepays and then it's hung up in deferred revenue.

David Duley

analyst
#56

And just so I understand the accounting of this. The prepay, are they giving you the full cost of the system? Is it a deposit to -- or they are customers trying to secure future capacity, just the nature of these payments.

Kevin Brewer

executive
#57

Yes. So we're -- with certain customers, we're requiring money down. It's typically not the full payment. But in some cases, it could be the value of the material that goes into the tool. And if I look at the cost of my tools, 85% of it is material, the rest is labor and all the other stuff. So we want to make sure that if somebody decides they don't want the order, we're not left paying on the materials. So it's a sizable chunk of money in some cases. And again, this is not what our customers. This is with maybe customers where we don't have a strong relationship and maybe newer customers and maybe in a particular region where we want to ask for that. And we haven't had any problems with people kind of coming up and putting money down so.

Operator

operator
#58

Your next question comes from the line of Mark Miller from the Benchmark Company.

Mark Miller

analyst
#59

I would also add my congratulations on the continued exceptional performance. And Mary, good luck on your new position. I just wanted to follow through. You mentioned you closed a Purion H eval during the quarter. Do you expect to close any other evals by the end of the year? And do you expect these evals to lead to additional orders?

Mary Puma

executive
#60

So we have 6 evals out in the field right now. And if you take a look at where they are and the types of equipment, I think about half of them, Mark, will close in 2023, and then the other 3 will bleed into 2024. And a lot of that is just based on the timing of when they were shipped and also the development that we're doing with the customers out in the field. Basically evals can either close prior to a 12-month period, which is the exception rather than the rule, and then they can bleed even a little bit over a year depending on the work that we're doing with that customer. The answer is yes. We expect the eval to turn into additional business. We have a Purion M right now under evaluation for DRAM application at a customer that has multiple Purion types, and we do expect that to turn into additional business. We have an XEmax out of a customer right now. It's a new customer, and that should also turn into new business. Two Purion Hs are out there. One is a new customer, and one is a new high current customer. They have other types of Purion. And then the Purion XE that's out in the field is also for a general mature type of application, but it's a new high energy penetration. That customer has other types of Purion tools. And then finally, the Dragon, the Purion Dragon which I mentioned earlier, is out for evaluation at -- for advanced logic, and that's a customer that has multiple types of Purions. So some of these customers are new, but most of them are actually customers that are just adding additional types of Purion products to their portfolio. All of them are -- I mean, we really wouldn't put the evaluation unit out there if we didn't expect it to be successful and to turn into future repeat business.

Mark Miller

analyst
#61

The taxes came down and tax rate came down this quarter. What should we think about for taxes for the remainder of the year?

Kevin Brewer

executive
#62

I'm glad you asked that, Mark, because I'm going to get asked by a lot of people. What I would tell you is I continue to model things at 15%, but I'm going to help you out in Q2 and tell you that I'm modeling it 13% to 14%. So -- but I always kind of leave the 15%. The biggest reason why we're not paying the corporate tax rate of -- was it '21, '22? '21, I guess -- is because a lot of our shipments go offshore, so there's a [indiscernible] deduction. I think we paid 13% on shipments that go offshore. So that's why I always kind of build in 15%. But there's R&D tax credits coming in. There's things with stock comp expense and that impacted from quarter-to-quarter. So use 13% or 14% in Q2, probably going to need to get to the numbers. And all this, as the year goes on, as -- because I feel comfortable, maybe I'll take it down. But I'll tell you personally, in my models, I just leave it at 15% in the Q3, Q4 right now.

Operator

operator
#63

Thank you so much. And sir, ma'am, you have no question at this time. [Operator Instructions] the Q&A portion of the call. I will now turn the call back over to Mary Puma, who will make a few closing remarks.

Mary Puma

executive
#64

Thank you, Liwei. So I'd like to thank you all for joining us today. We have a busy investor calendar in the coming months. In May, we will be at the B. Riley 23rd Annual Institutional Investor Conference in Los Angeles and the Craig-Hallum 20th Annual Institutional Investor Conference in Minneapolis. We will attend 4 conferences in June, the TD Cowen's 51st Annual TDD -- TDT Conference in New York City, the Stifel Cross Sector Insight Conference in Boston, the Needham Virtual Automotive Tech Conference and the William Blair 43rd Annual Growth Stock Conference in Chicago. In July, we will be attending the CEO Summit in San Francisco and conducting additional investor meetings at Semicon West. We hope to see you at one of these events. Thank you.

Operator

operator
#65

Thank you, presenters. And this concludes the presentation. Thank you for your participation in today's conference. You may now disconnect. Have a great day.

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